Stainless Steel Thermal Process Cassettes
This cassette is made for high-temperature wafer processing applications or specialty applications, including mega-sonic and cleaning processes. This all-welded type 316 stainless steel electro-polished cassette has outside dimensions similar to SEMI standard plastic process cassettes. SSC cassettes are transfer and automation compatible. Corrosion Resistance: 316SST offers better resistance than 302 and 304 SST; resists many industrial chemicals and solvents including: sodium and calcium brines, hypo chlorite solutions, phosphoric acid, sulfite liquors, and sulfurous acids.
|Wafer Size||76, 100, 150, 200|
|Dimensions||8.5 × 8 × 8.5 in|
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Industry standard open side wall high temperature 25-slot all-welded stainless steel metal cassettes used in semiconductor manufacturing operations. Typically used for high thermal processes, polyimide bake, and for ultrasonic cleaning applications. Designed for ISO Class 3 (FS209E Class 1) Thermal environments up to 550° C
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