Description

Automation compatible 25-slot all T6061 aluminum construction thermal process cassette used in semiconductor manufacturing operations worldwide. 300mm SEMI compliant design attributes. Weight reduction architecture with side handles for operator ergonomic comfort and safety. Features wafer retaining lock bar to prevent wafers from sliding out during transport. Hard clear (HC) anodization surface fi nish. All welded construction to reduce thermal expansion/contraction issues and preserve dimensional stability. Designed for ISO Class 3 (FS209E Class 1) Thermal environments up to 350° C. Weight:7.2 lbs. (3.2kg)

Specification

Wafer Size	300

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H-Square will ship the product to the customer using FedEx. Cost will be calculated using the FedEx website. H-Square does not charge an additional handling fee. If product is in inventory it will be shipped within 3 business days. If it is not in inventory, customer will be notified of the shipping date.

H-Square uses a Return Material Authorization (RMA) process. If you need to return a product, contact us at info@h-square.com to receive an RMA number. Please state name, product part number and reason for return. Once you receive the RMA number, ship the product back to H-Square. Customer is responsible for shipping costs to return product.

If the product is being returned under warranty as defective, it will be repaired or replaced at no charge after evaluation.
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H-Square warranties their products for one year from date of sale. This warranty does not cover wear and tear from normal use.

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