This cassette is made for high-temperature wafer processing applications or specialty applications, including mega-sonic and cleaning processes. This all-welded type 316 stainless steel electro-polished cassette has outside dimensions like SEMI standard plastic process cassettes. SSC cassettes are compatible with transfer and automation. Corrosion Resistance: 316SST offers better resistance than 302 and 304 SST; resists many industrial chemicals and solvents including: sodium and calcium brines, hypochlorite solutions, phosphoric acid, sulfite liquors and sulfurous acids.
This cassette is made for high-temperature wafer processing applications or specialty applications, including mega-sonic and cleaning processes. This all-welded type 316 stainless steel electro-polished cassette has outside dimensions like SEMI standard plastic process cassettes. SSC cassettes are compatible with transfer and automation. Corrosion Resistance: 316SST offers better resistance than 302 and 304 SST; resists many industrial chemicals and solvents including: sodium and calcium brines, hypochlorite solutions, phosphoric acid, sulfite liquors and sulfurous acids.
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