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Automatic Bulk Vertical Wafer Transfer Tool - AVT



Tabletop, automatic two-cassette vertical bulk-wafer transfer tool. Transfers wafers between various combinations of plastic, metal and quartz cassettes. Cassettes move, rather than wafers, for safer, cleaner transfers. Single-button operation makes the tool user-friendly. The AVT is a high reliability, low maintenance system. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.


Wafer Contact Materials: Antistatic Polypropylene & Acetal, which are high purity materials with good wear resistance, good thermal properties, and outstanding chemical resistance.

The AVT Features:

    • Transfers 25 wafers at one time.
    • 30 second cycle-time.
    • Lift comb is made from ESD-safe Acetal material.
    • Retainer combs are made from Black Acetal.


Wafer Size76, 100, 150, 200
Power Requirements24VDC 3 Amps 120VAC to 24VDC Power Supply Sold separately
Throughput60 cassettes per hour
Weight40 lbs
Shipping Info

Additional information

Shipping Weight 100 lbs
Dimensions 28 × 16 × 30 in

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