Tabletop, automatic two-cassette vertical bulk-wafer transfer tool. Transfers wafers between various combinations of plastic, metal and quartz cassettes. Cassettes move, rather than wafers, for safer, cleaner transfers. Single-button operation makes the tool user-friendly. The AVT is a high reliability, low maintenance system. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.
Wafer Contact Materials: Antistatic Polypropylene & Acetal, which are high purity materials with good wear resistance, good thermal properties, and outstanding chemical resistance.
The AVT Features:
Wafer Size | 76, 100, 150, 200 |
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Power Requirements | 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold separately |
Throughput | 60 cassettes per hour |
Weight | 40 lbs |
Shipping Weight | 100 lbs |
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Dimensions | 28 × 16 × 30 in |