Tabletop automatic RSP150 style reticle SMIF pod opener. SMIFPO16 unlocks 4-mechanism RSP150 pod base and lifts and stores the pod lid, allowing easy access to the inner masks. Simple one-button operation to open or close the pod. Safety features include Z-axis break system and a mask protrusion sensor. Compatible with all industry standard single and multi-stack RSP150 pods. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction.
|24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately
|13 × 17 × 34 in