This tabletop automatic 300mm FOUP door opener unlocks, removes and stores the FOUP door when accessing the wafers inside a FOUP. A rotating base mechanism below the FOUP allows for 360° degree rotation to position the open FOUP in the best ergonomic access position for the operator. Commonly installed at FOUP wash stations to disassemble and reassemble pods. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction.
Wafer Size | 300 |
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Power Requirements | 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately |
Throughput | 90 FOUPs per hour |
Weight | 60 lbs |
Shipping Weight | 140 lbs |
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Dimensions | 16 × 35 × 18 in |
H-Square will ship the product to the customer using FedEx. Cost will be calculated using the FedEx website. H-Square does not charge an additional handling fee. If product is in inventory it will be shipped within 3 business days. If it is not in inventory, customer will be notified of the shipping date.
H-Square uses a Return Material Authorization (RMA) process. If you need to return a product, contact us at info@h-square.com to receive an RMA number. Please state name, product part number and reason for return. Once you receive the RMA number, ship the product back to H-Square. Customer is responsible for shipping costs to return product.