Special 4-gripper horizontal antistatic photomask picks for handling 6” reticles to / from a Nikon mask cartridge box. Ordering part number is based on pellicle size and location - grippers are positioned to avoid contact with pellicle frame. (typically loaded into the Nikon cartridge pellicle down). Designed for ISO Class 3 (FS209E Class 1) antistatic construction, chemical resistantTangential edge-grip only; no front or back face of chrome or pellicle contact.
|Wafer Size||5 in, 6 in|
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