Automatic Wafer Mover/Sorter 76mm – 200mm
A tabletop automatic 76mm-200mm single wafer transfer / simple sorter. The AWM2 Series features a two-cassette stage configuration. Compatible with industry standard shipping, process and metal cassettes. A cost-effective automation tool designed to reduce wafer breakage and scratches due to manual wafer handling practices. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.
Additional Info
| Wafer Size | 76, 100, 150, 200 |
|---|---|
| Power Requirements | 24VDC 3 Amps 120VAC to 24VDC Power Supply Sold seperately |
| Throughput | 400 wafers per hour |
| Dimensions | 25"W x 30"L x 32"H |
| Weight | 75 lbs |
Shipping Info
Additional information
| Shipping Weight | 225 lbs |
|---|---|
| Dimensions | 25 × 30 × 31 in |
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Product
Description
A tabletop automatic 76mm-200mm single wafer transfer / simple sorter. The AWM2 Series features a two-cassette stage configuration. Compatible with industry standard shipping, process and metal cassettes. A cost-effective automation tool designed to reduce wafer breakage and scratches due to manual wafer handling practices. Designed for ISO Class 3 (FS209E Class 1); Antistatic construction; Specify cassette model number(s) with order.
- Touchscreen control
- 400 wafers per hour
- Gravity End-Effector with Kalrez 8575® pads
- Wafer mapping checks for wafer presence, cross-slot, double stack
- Wafer Protrusion Sensor
- Pitch Change Capable
- Multiple Recipe Modes
- Thin Wafer Handling
H-Square uses a Return Material Authorization (RMA) process. If you need to return a product, contact us at info@h-square.com to receive an RMA number. Please state name, product part number and reason for return. Once you receive the RMA number, ship the product back to H-Square. Customer is responsible for shipping costs to return product.
- If the product is being returned under warranty as defective, it will be repaired or replaced at no charge after evaluation.
- If product is being returned unused and unopened within 30 days, a full refund will be offered, less original shipping charges.
- If the product is being returned used within 30 days, product will be evaluated for condition and customer refunded accordingly.
- Products over 30 days cannot be returned for refund.
