• Low contact transfer machine provides a safe means of mass transferring wafers from cassette to cassette.

• Wafers are gently lifted midpoint in the cassette slots before extracting or loading them to minimize contact with the cassette which could cause particulation.

• Optical and mechanical sensors combined with software logic guard against operation errors such as trying to transfer wafers into a cassette which is already loaded with wafers.

• User-friendly fail-safe operation features simple one-button actuation.

• Sturdy construction assures high reliability and robustness required in high throughput fabs.

• Small footprint saves valuable cleanroom space.

• Vertical transfer machine safely mass transfers wafers between various combinations of plastic and quartz cassettes.

• Ideal for transferring thin wafers.

• Small footprint saves valuable cleanroom space.

• Proprietary wafer lifter minimizes alignment problems.

• Cassettes move, rather than wafers, for safer, cleaner transfer.

• Absence of comb pivot points above wafers ensures cleanliness.

• Single button operation makes unit very user-friendly.

• Simple design for reliability and low maintenance.

AWT3HL8-AC

Automatic Wafer Transfer Machine

• Automatic wafer transfer machines safely mass transfers wafers between cassettes.

• Small footprint design minimizes valuable work bench space required for operation.

• Color-coded positioning dots make correct cassette placement easy for operators.

• Heavy-duty construction and high-quality internal components assure long life and continued accuracy.

• Cassette position sensors allow operation only when cassettes are properly positioned to assure safe wafer transfers.

• Added safety provided by circuitry which stops transfer when excessive force is detected.

• ESD safe construction.

• Class 1 cleanroom compatible.

WT4H

• Manual wafer transfer machines safely mass transfers wafers between various combinations of SEMI standard cassettes.

• Units are constructed of chemical resistant materials and are ideal for wet areas.

• ESD safe units are also available.

LCTAS12

• 300mm low contact transfer machine provides safe means of mass transferring wafers from cassette to cassette.

• Wafers are gently lifted midpoint in the cassette slots before extracting or loading to minimize contact with the cassette which could cause particulation.

• Safety sensor detects wafers in the pod.

• Optional mapper available to detect cross slotted wafers.

• User-friendly fail-safe operation features simple one-button actuation.

• Small footprint saves valuable cleanroom space.

• Sturdy construction assures high reliability and robustness required in high throughput fabs.

• Unit is compatible with SEMI standard FOUPs and FOSBs.

• ESD safe construction.