ETAS6

• Aligns and escalates wafers in 24 seconds so operator can view ID.

• Allows quick view of wafer edges and film patterns.

• Small footprint saves tabletop space.

• Units are modified to work with wafers as thin as 0.007".

AFEZ-6AC
Patent # 4,662,811

Flat/Notch Finders

• EZ Guide auto flat and notch  finders provide safe means of aligning thin wafer flats or notches.

• Cassette positioning system assures that cassettes are seated correctly for safe operation.

• ESD protected by static-dissipative plastics.

• Proprietary static-dissipative polyurethane roller withstands more than 2,000,000 cycles with accuracy of less than +1º.

• Units are modified to work with wafers as thin as 0.007".

LCTAS8-AC

Low Contact Wafer Transfer Machine

• Low contact transfer machine provides safe means of mass transferring thin wafers from cassette to cassette.

• Wafers are gently lifted midpoint in the cassette slots before extracting or loading them to minimize contact with the cassette which could cause particulation.

• Optical and mechanical sensors combined with software logic guard against operation errors such as trying to transfer wafers into a cassette which is already loaded with wafers.

• User-friendly fail-safe operation features simple one-button actuation and LEDs to guide operator through the transfer sequence.

• Sturdy construction assures high reliability and robustness required in high throughput fabs.

• Small footprint saves valuable cleanroom space.

AVT8AC

• Vertical plastic to quartz transfer machine for up to 200mm wafers.

• Ideal for transferring thin wafers.

• Small footprint saves valuable cleanroom space.

• Proprietary wafer lifter minimizes alignment problems.

• Cassettes move, rather than wafers, for safer, cleaner transfer.

• Absence of comb pivot points above wafers ensures cleanliness.

• Single button operation makes unit very user-friendly.

• Simple design for reliability and low maintenance.

• Proprietary aluminum plating allows sharp edged wafers to be transferred smoothly.

• H-Square metal cassettes can be modified to non-standard pitches to provide room for wafer safety.

• Available for all sizes of wafers.

WP6-AC

• Presents wafers for inspection without removal from cassette.

• Custom wafer lifter made to fit many sizes of thin wafers.

• Special v-groove saddle gently lifts wafers without contacting others in the cassette.

• Units can be used with outside diameter mechanical edge picks.

• ESD safe and class 1 cleanroom compatible.