FEATURED PRODUCT

TS3 Trouble Station 3

H-Square introduces the TS3^TM 300mm Troubleshooting Station. The TS3 is an inexpensive tool set which aids in common 300mm wafer and carrier handling applications. The TS3 is ideally suited for use in wafer rescue applications, but can also serve as an alternative to expensive sorting platforms in back-end test and sort areas, labs, OEMs and R&D areas. The tool set consists of three components: automatic FOUP opener, automatic low-contact wafer transfer machine and portable vacuum wand (Freedom Wand^TM). The automatic FOUP opener removes and secures FOUP door at the touch of a button. Once the door is removed, the FOUP can be rotated 180º to allow easy access and removal or transfer of wafers. The low contact transfer machine can be used to automatically mass transfer wafers between various combinations of FOUPs and/or FOSBs. The tool includes a wafer mapper to insure wafer safety. A stainless steel table is available as an option.

FWCR3AC
Patent# 5,217,273

Cordless Freedom Wand^TM

• Self-contained cordless battery powered vacuum wand allows freedom from vacuum lines.

• Models available for up to 300mm wafers.

• 180 minutes of continuous run time.

• Direct connect to power supply allows use with discharged batteries.

• Ergonomically designed with finger contours for comfort - fits into palm of operator’s hand.

• Charger stand safely stores wand out of the way.

• Smart charger system keeps battery fully charged without worry of damage from overcharging.

NO3AS-001

Pistol Grip Vacuum Wands

• Ergonomically designed vacuum wands for safe injury free wafer handling.

• Wands allow operators to maintain neutral wrist positions when working with cassettes in preferred orientations.

• ESD safe construction.

• Wand is compatible with all H-Square vacuum tips, including 300mm designs

• Ergonomic and Safety Department approved.

MC12HC-002
(includes wafer safety bar)

300mm 25 Slot Metal Cassette

• 25 slot aluminum bakeout cassette.

• Automation compatible; load lock and sorter compatible.

• Lightweight (7.5 lbs.) – 2 lbs. less than the weight of a FOUP.

• Ergonomic interlocking offset handles.

• 10 degree cassette tilt for even wafer spacing.

• Optional info pad and wafer safety bar.

• Ergonomic and Safety Department approved.

ACW

Amorphous Carbon Wafers

• Long life amorphous carbon wafers.

• Used as replacements for dummy and test Si and SiC wafers and thin film measurement wafers.

• Amorphous carbon wafers last for years, resulting in low cost of ownership.

• Impervious to acids and bases - etching will not damage wafers.

• Available in SEMI standard sizes (150mm, 200mm, 300mm).

SQ22558-4

300mm Auto FOUP Opener

• Self-contained auto opener provides means to gain access to wafers off-line.

• Push button operation facilitates ease of use.

• Simple design for reliability and low maintenance.

• Unique low profile design ideal for tabletop applications.

• Models available for 13 and 25 wafer FOUPs.

• Custom modifications available to fit your requirements.

• Small footprint saves valuable cleanroom space.

FS-001

• Ergonomic 300mm FOUP stand.

• Adjustable height for operator comfort.

• Side-to-side tilt allows optimal positioning and reduces wrist motion during wafer handling.

• Designed to fit one standard FOUP or FOSB or two process cassettes (side by side).

• Ergonomic and Safety Department approved.

NOP191-003

T693PKAS3-001

AVT8AC

Two-Stage Vertical Transfer Machine

• Vertical plastic to quartz transfer machine for up to 200mm wafers.

• Small footprint saves valuable cleanroom space.

• Proprietary wafer lifter minimizes alignment problems.

• Cassettes move, rather than wafers, for safer, cleaner transfer.

• Absence of comb pivot points above wafers ensures cleanliness.

• Single button operation makes unit very user-friendly.

• Simple design for reliability and low maintenance.

• Ideal for transferring thin wafers.

• Modes to transfer between plastic cassettes, plastic and metal cassettes and low profile Teflon cassettes available.

SMIFPO8AC

Semiautomatic SMIF Pod Opener

• Tabletop unit opens all SMIF pods safely and smoothly.

• Retracts and holds cover for easy access to cassette and safe clean storage of cover.

• Push button operation facilitates ease of use.

• An economical alternative to SMIF load port openers.

• Small footprint (slightly larger than POD itself in 150mm and 200mm models) saves valuable cleanroom space.

• Simple design for reliability and low maintenance.

CPA6-003

SRD Cassette Handle

• Plastic cassette handle for Spin Rinse Dryers.

• Provides safety barrier between operator and wet cassette.

• Keeps cassettes clean.

• Ergonomic angle keeps wrists straight.

• Compatible with most barrel Spin Rinse Dryers.

• Wall mount holder available.