
MC12HC-002
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300mm
25 Slot Metal Cassette
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25
slot aluminum bakeout cassette.
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Automation
compatible; load lock compatible.
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Lightweight
– less than the weight of a FOUP.
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Ergonomic
interlocking offset handles.
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10
degree cassette tilt for even wafer spacing.
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Optional
info pad and wafer safety bar.
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Ergonomic
and Safety Department approved.
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SQ22766 -X |
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285-8HC & MC8HC |
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285
& MC Style Metal Cassettes
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Precision
conventional aluminum cassettes for semiconductor manufacturing
operations.
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Designed for ultra
high-precision carrier requirements and/or where elevated
temperatures cause warpage to plastic carriers.
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Four surface
treatments are available.
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Radius on fins
prevent sharp edges from scraping wafer surfaces.
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SEMI standard
"h-bar" location and slot spacing.
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Numerous standard and
custom sizes and variations available.
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SQ20206-X
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Stainless
Steel Cassettes
25
slot stainless steel "Asher" style cassettes for use in
ultra-high temperature applications.
Designed
for applications where temperatures exceed the limitations of
aluminum constructions.
Four-point
wafer contact locations.
A
variety of straight and custom-angled cassette handles are also
available.
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SQ21626-X & SQ20501-X
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Aluminum
Cassettes
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25
slot open aluminum cassettes for plasma stripper, etcher or bake
out applications.
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Pocket
depth , slot width , pitch and D1 dimensions are the same as
alternative 285 and MC style cassettes.
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Lightweight
- less than total weight of standard plastic cassettes.
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High-polished
bare 6061 aluminum construction.
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Aluminum
spacer rods stabilize the base of the cassette to maintain
rigidity.
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8º
integrated tilt insures wafers rest against backside.
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A
variety of straight and custom-angled cassette handles are also
available.
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CPH6, CPV6 & CPA6
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CHMC456
& CH-6
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Cassette Handles
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Cassette
handles provide a safe, reliable method for handling cassettes by
top lip or side flanges.
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Many
designs and profiles available.
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Lightweight
polypropylene and 304 electropolished stainless steel
construction.
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High
temperature Torlon or ESD safe grippers available.
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Designed
to work with most plastic and metal cassettes.
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Ergonomic
and Safety Department approved!
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CS-6D
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Cassette Stands
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Durable,
lightweight white polypropylene cassette stand positioners.
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Tilted
position increases wafer visibility and decreases operator wrist
rotation and associated discomfort.
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Designed
to be used with both standard vacuum wands and ergonomic
pistol-grip designs.
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Custom
angles, side walls, elongated "dual" cassette stands and
custom heights are available through H-Square Custom Products
Department.
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Ergonomic
and Safety Department approved!
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