Cordless Freedom Wand^TM

• Self-contained cordless battery powered vacuum wand allows freedom from vacuum lines.

• Models available for up to 300mm wafers.

• 180 minutes of continuous run time.

• Direct connect to power supply allows use with discharged batteries.

• Ergonomically designed with finger contours for comfort - fits into palm of operator’s hand.

• Charger stand safely stores wand out of the way.

• Smart charger system keeps battery fully charged without worry of damage from overcharging.

• Designed (5.6mm thick) for access to wafers in cassettes, space restricted equipment and wafer holding fixtures.

• Engineered to minimize plastic tip flexure which is a critical design element for safe handling of heavy wafers.

• Unique tip/wand coupling system provides the ability to rotate tip for ease-of-use and accommodates right and left handed operators.

• Secure grip of wafer enhanced by tip length which provides ability to secure wafer near its center.

NO3T3PKAS-001

300mm Pistol Grip Vacuum Wands

• Ergonomically designed vacuum wands for safe wafer handling.

• Wands allow operators to maintain neutral wrist positions when working with cassettes in preferred orientations.

• ESD safe construction.

• Wand is compatible with all H-Square press-fit vacuum tips.

• Ergonomic and Safety Department approved.

MC12HC-002

300mm 25 Slot Metal Cassette

• 25 slot aluminum bakeout cassette.

• Automation compatible; load lock compatible.

• Lightweight – less than the weight of a FOUP.

• Ergonomic interlocking offset handles.

• 10 degree cassette tilt for even wafer spacing.

• Optional info pad and wafer safety bar.

• Ergonomic and Safety Department approved.

FOMH

SQ22558-2

SQ22558-4

• Automatic & manual openers provide access to wafers in 300mm FOUPs.

• Self-contained openers provide means to gain access to wafers off-line.

• Simple designs for reliability and low maintenance.

• Unique low profile or handheld designs ideal for tabletop applications.

• Models available for 13 and 25 wafer FOUPs.

• Custom modifications available to fit your requirements.

• Small footprint saves valuable cleanroom space.

ANF3SR-AC
Patent# 5,551,829

• 300mm automatic and manual notch finders safely align wafer notches.

• Unique wafer roller and alignment systems capture and position notches cleanly and accurately.

• Open designs allow increased laminar air flow and improve cleanliness with minimal footprint.

• EZ Guide^TM positioners ensure properly seated cassettes. 

• ESD safe construction. 

• Class 1 cleanroom compatible.

FS-001

• Ergonomic 300mm FOUP stand.

• Adjustable height for operator comfort.

• Side-to-side tilt allows optimal positioning and reduces wrist motion during wafer handling.

• Designed to fit one standard FOUP or FOSB or two process cassettes (side by side).

• Ergonomic and Safety Department approved.

ACW

Amorphous Carbon Wafers

• Long life amorphous carbon test wafers.

• Used as replacements for dummy and test Si and SiC wafers.

• Amorphous carbon lasts for years, resulting in low cost of ownership.

• Impervious to acids and bases - etching will not damage wafers.

• Available in SEMI standard sizes (150mm, 200mm, 300mm).

LCTAS12

• 300mm low contact transfer machine provides safe means of mass transferring wafers from cassette to cassette.

• Wafers are gently lifted midpoint in the cassette slots before extracting or loading to minimize contact with the cassette which could cause particulation.

• Safety sensor detects wafers in the pod.

• Optional mapper available to detect cross slotted wafers.

• User-friendly fail-safe operation features simple one-button actuation.

• Small footprint saves valuable cleanroom space.

• Sturdy construction assures high reliability and robustness required in high throughput fabs.

• Unit is compatible with SEMI standard FOUPs and FOSBs.

• ESD safe construction.

NOP191-003

• 300mm quartz tip for high temperature applications.

• Heavy duty design supports 300mm wafers safely.