2851 ALUMINUM METAL WAFER CASSETTES
2851 series cassettes are conventional 25 slot metal cassettes used in semiconductor
manufacturing operations. They are typically used in areas where wafer positioning is
important or where elevated temperatures cause warpage to other carriers. 2851 series
cassettes are direct replacements for many OEM metal carriers used with wafer
track/elevator systems, photo resist bake systems, and robotic loading systems for CVD
and etch processes. This series has been incorporated as the original equipment carrier
provided by similar OEM’s. H-Square metal cassettes offer the precision demanded by
users at very competitive prices and with reasonable lead times.
The 2851 series is manufactured from aluminum alloy for precision and high strength.
Slots feature an 8º angle to reduce front and backside wafer contact. Stainless steel
spacer bars and fasteners are used to precisely secure the side plates to each other.
Two solid PFA rods are used to support the wafers in the slots. Aluminum 2851 series
cassettes are compatible with the CH handle.
2851-2EN 50mm, EN finish, open end wall 2851-2HC 50mm, HC finish, open end wall
2851-3B 75mm, B finish, open end wall 2851-3EN 75mm, EN finish, open end wall
2851-3HC 75mm, HC finish, open end wall 2851-3PFA 75mm, PFA finish, open end wall
2851-4B 100mm, B finish, open end wall 2851-4EN 100mm, EN finish, open end wall
2851-4HC 100mm, HC finish, open end wall 2851-4PFA 100mm, PFA finish, open end wall
2851-5B 125mm, B finish, open end wall 2851-5EN 125mm, EN finish, open end wall
2851-5HC 125mm, HC finish, open end wall 2851-5PFA 125mm, PFA finish, open end wall
2851-6B 150mm, B finish, open end wall 2851-6EN 150mm, EN finish, open end wall
2851-6HC 150mm, HC finish, open end wall 2851-6PFA 150mm, PFA finish, open end wall
2851-8B 200mm, B finish, open end wall 2851-8EN 200mm, EN finish, open end wall
2851-8HC 200mm, HC finish, open end wall 2851-8PFA 200mm, PFA finish, open end wall
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MCI ALUMINUM METAL WAFER CASSETTES
MC1 series cassettes are based on the popular 2851 series, but it includes a solid end
wall in place of the stainless steel spacer bars on the end opposite the H-bar. Six #6-32
TPI flat head screws secure the end wall. All other features (including PFA rod stops) of
the 2851 series are incorporated in the MC1 series. The solid end wall is machined from
6061 T-6 aluminum alloy, and receives the same surface treatment as the carrier side
plates. Two stainless steel rods fit into reliefs machined in the outside face of the plate.
The rods provide a mechanical interface for the CHMC, CHMCL, CHMCDH8 style cassette
handles. The solid end wall significantly increases the shock resistance and durability of
the cassette, allowing it to remain tight and in alignment for a longer period of time
compared to the spacer bar style. The end wall also acts as an effective particle shield
for the top wafer in applications where the cassette is used in an H-bar down (wafer
horizontal) position.
MC1-4B 100mm, B finish, solid end wall MC1-4EN 100mm, EN finish, solid end wall
MC1-4HC 100mm, HC finish, solid end wall MC1-4PFA 100mm, PFA finish, solid end wall
MC1-5B 125mm, B finish, solid end wall MC1-5EN 125mm, EN finish, solid end wall
MC1-5HC 125mm, HC finish, solid end wall MC1-5PFA 125mm, PFA finish, solid end wall
MC1-6B 150mm, B finish, solid end wall MC1-6EN 150mm, EN finish, solid end wall
MC1-6HC 150mm, HC finish, solid end wall MC1-6PFA 150mm, PFA finish, solid end wall
MC1-8B 200mm, B finish, solid end wall MC1-8EN 200mm, EN finish, solid end wall
MC1-8HC 200mm, HC finish, solid end wall MC1-8PFA 200mm, PFA finish, solid end wall
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SSC STAINLESS STEEL METAL WAFER CASSETTES
For high temperature wafer bake-out applications or specialty applications, including
megasonic and cleaning processes. All welded 316SST electro-polished construction.
Outside dimensions are similar to SEMI standard plastic process carriers. Transfer and
automation compatible. Light Weight: Standard SST 200mm cassette ~2.5lbs.
Temperature: maximum recommended continuous operating temperature without causing
distortion is 550º Celsius. Corrosion Resistance: 316SST offers better resistance than
302 and 304 SST; resists many industrial chemicals and solvents including: sodium and
calcium brines, hypo chlorite solutions, phosphoric acid, sulfite liquors, and sulfurous
acids. Standard cassettes are designed for 75mm, 100mm, 125mm, 150mm and 200mm,
25-slot wafer configurations. Non standard 10-slot, 12-slot, 13-slot, 26-slot and 28-slot
cassettes, as well as carriers for square substrates and other non-standard diameters
and wafer thicknesses are available upon request. Please contact our Custom Products
Department for more information.
SSC100 Metal Cassette, Stainless Steel, Welded 100mm
SSC125 Metal Cassette, Stainless Steel, Welded 125mm
SSC150 Metal Cassette, Stainless Steel, Welded 150mm
SSC200 Metal Cassette, Stainless Steel, Welded 200mm
SSC300 Metal Cassette, Stainless Steel, Welded 300mm
Please contact H-Square for additional sizes and features
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SSC STAINLESS STEEL METAL THIN WAFER CASSETTES
For high temperature thin wafer bake-out application. Same as the standard SSC series
cassettes, with special considerations for thin wafer handling. For high temperature wafer
bake-out applications or specialty applications, including megasonic and cleaning
processes. All welded 316SST electro-polished construction. Light Weight: Standard SST
200mm cassette ~2.5lbs. Temperature: maximum recommended continuous operating
temperature without causing distortion is 550º Celsius. Corrosion Resistance: 316SST
offers better resistance than 302 and 304 SST; resists many industrial chemicals and
solvents including: sodium and calcium brines, hypo chlorite solutions, phosphoric acid,
sulfite liquors, and sulfurous acids.
SSC200-008 Metal Cassette, Stainless Steel, Thin Wafer, 13 slot, 200mm
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300mm ALUMINUM WELDED 25 SLOT CASSETTES
Lightweight ergonomic design minimizes weight and potential for operator fatigue.
Made from welded hard clear anodized aluminum to provide dimensional stability over time
and temperature changes. Temperature: maximum recommended continuous operating
temperature without causing distortion is 350º Celsius. Features SEMI standard kinematic
coupling positioners and info pad. Transfer compatible with all FOUP and FOSB carriers.
Weighs only 6.5lbs. Standard plastic FOUP weighs approximately 10 lbs. Cassette
features wafer retaining lock-bar for safe transportation of wafers in a horizontal wafer
position.
MC12-25HC1 300mm SEMI standard Bake and Process Cassette
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MC12 SERIES 300mm ALUMINUM WELDED 13 SLOT THIN WAFER CASSETTES
Lightweight ergonomic design minimizes weight and potential for operator fatigue. Made
from welded hard clear anodized aluminum to provide dimensional stability over time and
temperature changes. Features SEMI standard kinematic coupling positioners and info
pad. Transfer compatible with all FOUP and FOSB carriers. Temperature: maximum
recommended continuous operating temperature without causing distortion is 350º
Celsius. Cassette features wafer retaining lock-bar for safe transportation of wafers in a
horizontal wafer position.
MC12-13HCP1-001 300mm Thin wafer cassette.
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SSC SERIES 300mm CASSETTES
For high temperature wafer bake-out applications or specialty applications, including
megasonic and cleaning processes. All welded 316SST electro-polished construction.
Temperature: maximum recommended continuous operating temperature without causing
distortion is 550º Celsius. Corrosion Resistance: 316SST offers better resistance than
302 and 304 SST; resists many industrial chemicals and solvents including: sodium and
calcium brines, hypo chlorite solutions, phosphoric acid, sulfite liquors, and sulfurous
acids.
SSC300 300mm Stainless Steel Cassette
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MCF SERIES CASSETTES
This 150mm or 200mm all aluminum solid side wall metal cassette is designed for use in
pace of standard process plastic cassettes. Features include robotic flanges, aluminum
wafer support combs and vented screws.
SQ21140-2 150mm MCF electroless nickel
SQ21140-1 150mm MCF hard clear anodized
MCF8EN 200mm MCF electroless nickel
MCF8HC 200mm MCF hard clear anodized
MCF8P 200mm MCF polished bare aluminum
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SQ22766 SERIES HIGH TEMPERATURE CASSETTES
This plated all aluminum cassette is designed for high temperature applications (up to
350º C). Aluminum wafer support cradles wafer from the bottom to prevent pinching of
wafers caused by cassette expansion and contraction. The all aluminum plated notched
wafer support is available for our 2851 and our MC1 series, 75mm, 100mm, 125mm,
150mm and 200mm standard metal cassettes.
Please contact the Custom Products Department for more information.
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ALUMINUM ASHER STYLE CASSETTE
Contact H-Square Custom Products Department for more information.
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ALUMINUM OEM REPLACEMENT CASSETTES
Contact H-Square Custom Products Department for more information.
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ALUMINUM OEM REPLACEMENT CASSETTES
Contact H-Square Custom Products Department for more information.
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SQ20501 SERIES ALUMINUM BAKE-OUT CASSETTES
All aluminum welded bake-out cassette. Contact H-Square Custom Products Department
for more information and options.
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CASSFPD SERIES FLAT PANEL DISPLAY CASSETTES
Contact H-Square Custom Products Department for more information.
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