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Handling Tools for the Electronics Industry

THIN SUBSTRATE VACUUM WAND HANDLING TOOLS

H-SQUARE manufactures an extraordinary number of different types of vacuum tips for
many different sizes, shapes, weights and materials of wafers, substrates, dies and
packages and applications/equipment, as well as for a complete range of temperature
and chemical environments.
An in-house (installed to house vacuum) vacuum wand sets are comprised of four parts
- vacuum tip, wand handle, coiled vacuum cord and wand holder. Below are the most
up-to-date sets for these applications. These sets incorporate our newest products and
materials. They are ESD protected to ensure wafer and component safety while
eliminating particle attraction due to static changes. Wands are made from chemical
resistant conductive PVDF.

COMPLETE SETUP = WAND HANDLE + WAND TIP + WAND HOLDER + COIL CORD

Thin

PART NUMBER	DESCRIPTION	MATERIAL
NOASPF2	WAND HANDLE	ESD Safe PVDF
T693PKAS3-001	VACUUM TIP	ESD Safe PEEK
CC11SDS	COIL CORD	ESD Safe Polyurethane
HSU	HOLDER	White Polypropylene

MISC1400 OFFSET THIN WAFER VACUUM WAND
150mm, 200mm and 300mm ESD safe thin wafer vacuum wand. Horizontal offset
"Hoop Style" for supporting 80µ - 250µ thin inverted wafers from backside. Material:
T7071 aluminum with PFA coating. Ships complete with end effector tip, NO3AS1
wand handle, CC11SDS coil cord, and HSU3PT wand holder

MISC1400-004 for handling 200mm and 300mm thin wafers
MISC1400-008 for handling 150mm and 200mm thin wafers

MISC1400 STRAIGHT THIN WAFER VACUUM WAND
200mm and 300mm ESD safe thin wafer vacuum wand. Straight "Hoop Style" for
supporting 80µ - 250µ thin wafers from the backside. Material" T7071 aluminum
with PFA coating. Ships complete with end effector tip, NOASPF2 wand handle,
CC11SDS coil cord, and HSUPT wand holder

MISC1400-006 for handling 200mm and 300mm thin wafers

300mm "U" SHAPED THIN WAFER VACUUM WAND
300mm ESD safe thin wafer vacuum wand. Backside supporting vacuum wand end
effector for handling 80µ - 250µ thin wafers. Material is T7071 aluminum with HCP
coating. Ships complete with end effector tip, NO3AS1 wand handle, CC11SDS coil
cord, and HSU3PT wand holder

NO3T3-001 for handling 300mm thin wafers

200mm TAIKO STYLE WAFER VACUUM WAND
ESD safe PEEK vacuum wand assembly for handling TAIKO and MEMS style wafers
from the edge exclusionary area.

NO3T3PKAS-007 for handling 200mm thin wafers with 4mm edge

OFFSET 300mm THIN WAFER TIP/WAND ASSEMBLY
45 degree angle horizontal offset ESD safe PEEK thin wafer handling wand/tip
assembly. Recommended for 220µ - 350µ thick 300mm wafers.

NO3T3PKAS-008 for handling 300mm thin wafers

300mm THIN WAFER TIP
300mm ESD safe PEEK thin wafer tip. Recommended for 220µ - 350µ thick 300mm
wafers. Compatible with standard NO3AS1 standard vacuum wand.

T3PKAS1-001 for handling 300mm thin wafers.

T791PKAS 50mm-75mm ESD safe PEEK thin
wafer vacuum tip

T792PKAS 75mm-100mm ESD safe PEEK
thin wafer vacuum tip

T794PKAS 100mm-150mm ESD safe PEEK thin
wafer vacuum tip

T693PKAS3-001 75mm-200mm ESD safe
PEEK thin wafer vacuum tip

T693PKAS2D-001 75mm-200mm ESD safe
PEEK thin wafer vacuum tip - 20 degree bend
down

Recommended ESD safe vacuum set -
vacuum tip, plus NOASPF2 wand, HSU holder
and CC11SDS coil cord

150mm-200mm Thin Wafer Recommendation