Handling Tools for the Electronics Industry
75mm VACUUM WAND HANDLING TOOLS
H-SQUARE manufactures an extraordinary number of different types of vacuum tips for
many different sizes, shapes, weights and materials of wafers, substrates, dies and
packages and applications/equipment, as well as for a complete range of temperature
and chemical environments.
An in-house (installed to house vacuum) vacuum wand sets are comprised of four parts -
vacuum tip, wand handle, coiled vacuum cord and wand holder. Below are the most
up-to-date sets for these applications. These sets incorporate our newest products and
materials. They are ESD protected to ensure wafer and component safety while
eliminating particle attraction due to static changes. Wands are made from chemical
resistant conductive PVDF.
COMPLETE SETUP = WAND HANDLE + WAND TIP + WAND HOLDER + COIL CORD
75mm
PART NUMBER
|
DESCRIPTION
|
MATERIAL
|
NOASPF2
|
WAND HANDLE
|
ESD Safe PVDF
|
T691PKAS
|
VACUUM TIP
|
ESD Safe PEEK
|
CC11SDS
|
COIL CORD
|
ESD Safe Polyurethane
|
HSU
|
HOLDER
|
White Polypropylene
|
|
|
|
|
|
T691PKAS
Material: injection molded antistatic PEEK
General usage, 50mm - 100mm
Recommended vacuum wand: NOASPF2
|
T791PKAS
Material: injection molded antistatic PEEK
Thin Wafer / Compound Semiconductor
materials 50mm-100mm
Recommended vacuum wand: NOASPF2
|
T37504TOR
Material: machined Torlon®
Long, narrow tip for general handling
materials 75mm-100mm
Recommended vacuum wand: NOASQ2
Also available in PEEK and Vespel®
|
|
|
|
|
T75049V
Material: machined Vespel®
Knife edge for loading/unloading from
platens and susceptors
75mm-100mm
Recommended vacuum wand: NOASQ2
Also available in Torlon®
|
T100V
Material: machined Vepsel®
For handling wafers perpendicular to
surface of wafer. Available with inset o-rings
on face of tip.
75mm-150mm
Recommended vacuum wand: NOASQ2
Also available in PEEK
|
T75033QV
Material: Quartz and Vespel®
High temperature application. Features
knife edge spatula facilitates pick up of
wafers from a flat surface, like Epitaxial
reactors and high temperature platens.
Recommended vacuum wand: NOASQ2
|
|
|
|
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T75048TOR
Material: machined Torlon®
High temperature usage 50mm-75mm
Recommended vacuum wand: NOASQ2
Also available in Vepsel®
|
T75072V
Material: machined Vespel®
High temperature compound semiconductor
usage 75mm-100mm
Recommended vacuum wand: NOASQ2
Also available in PEEK and Torlon®
|
T75010PKAS
Material: machined antistatic PEEK
General usage 75mm-125mm
Recommended vacuum wand: NOASQ2
Also available in Vespel® and Torlon®
|
|
Patent# 5,511,840
Recommended 75mm Vacuum Wand
Set
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