H-Square SMIF POD and FOUP Door Openers

Handling Tools for the Electronics Industry

SMIF POD AND FOUP DOOR OPENERS

Standard Mechanical Inter Face (SMIF) pods and Front Opening Unified Pod (FOUP) carriers are based on an
Isolation technology developed in the 1980s at Hewlett-Packard. Today, this system is in used in many
semiconductor wafer fabrication and cleanroom environments throughout the world for both wafer handling
and photomask reticle handling.
H-Square pod openers provide an inexpensive method of gaining access to a substrate storage pod carrier.
We have a complete line of both automated and manual stand alone tools. Units are ideal for any application
where particulate contamination must be avoided.

AFO - AUTOMATIC FOUP POD OPENER
Automatic door opener provides clean and easy access to wafers in a SEMI
standard 300mm FOUP. Interlocked load port turntable stage allows for 360
degree FOUP rotation to give operators access to the open FOUP.
When open, the FOUP door is kept clean. Simple design for reliability and low
maintenance. Unique low profile design ideal for tabletop applications and FOUP
wash stations. Small footprint saves valuable cleanroom space.

AFO

FOMH - MANUAL 300mm FOUP POD OPENER
Manual ergonomic dual-pistol grip design allows for FOUP doors to be propped
up when door is removed. One pistol grip handle rotates, turning the FOUP door
opening mechanism. Simple designs for reliability and low maintenance.

FOMH

SMIFMAN6 - RSP150 MANUAL RETICLE SMIF POD OPENER
An economical means to gain access to the interior of a RSP150 reticle
photomask storage POD. Works with single and multistack style RSP150 PODs.
Features POD lid storage area to keep the lid base clean when set aside from
the base mechanism. ESD Safe design. Small tabletop footprint.

SMIFMAN6

SMIFPO8 AUTOMATIC RSP200 RETICLE SMIF POD OPENER
Semi-automatic RSP200 reticle SMIF pod opener provides easy access to
photomasks stored inside RSP200 cassettes with minimal operator involvement.
Units are compatible with most standard RSP200 pod designs. Smooth, reliable
lift automation for reliability and cleanliness. Class One Cleanroom compatible.
ESD protection insured by static dissipative plastics.

SMIFPO8

SMIFMAN8 - RSP150 MANUAL RETICLE SMIF POD OPENER
An economical means to gain access to the interior of an RSP200 reticle
photomask storage pod. Features pod lid storage platform to keep the RSP lid
clean when accessing the pod. ESD safe design. Small tabletop footprint.
May also be used to open/close 200mm SMIF POD cassettes.

SMIFMAN8

SMIFPO8 - AUTOMATIC 200mm SMIF POD OPENER
Semi-automatic SMIF pod opener provides easy access to wafer cassettes with
minimal operator involvement. Units are compatible with most standard 200mm
SMIF pod designs. Smooth, reliable lift automation for reliability and cleanliness.
Class One Cleanroom compatible. ESD protection insured by static dissipative
plastics. Designs available for two different wafer cassette orientations.

SMIFPO8

SMIFMAN8 - 200mm MANUAL SMIF POD OPENER

An economical means to gain access to the interior of a 200mm SMIF pod
process cassette. Units are compatible with most standard 200mm SMIF pod
designs. Features pod lid storage platform to keep the lid base clean when
accessing the pod. ESD safe design. Small tabletop footprint. May also be used
to open/close RSP200 reticle SMIF pods.

SMIFMAN8

SMIFMAN6 RSP150 opener
with an ASML style multiple
reticle cassette

SMIFMAN6 RSP150 opener
with a single reticle cassette