LCT - LOW CONTACT TRANSFER SYSTEM
Low contact transfer machine provides a safe means of mass transferring wafers
from cassette to cassette. Wafers are gently lifted midpoint in the cassette slots
before extracting or loading them to minimize contact with the cassette which could
cause particulation or wafer edge chipping. Optical and mechanical sensors
combined with software logic guard against operation errors such as trying to transfer
wafers into a cassette which is already loaded with wafers. User-friendly fail-safe
operation features simple one-button actuation. Sturdy construction assures high
reliability and robustness required in high throughput fabs. Small footprint saves
valuable cleanroom space.
LCTAS6 - 150mm system
LCTAS8 - 200mm system
additional substrate sizes are available
ultra thin wafer versions available ( < 220 microns)
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LCT - 300mm FOUP LOW CONTACT TRANSFER SYSTEM
300mm low contact transfer machine provides safe means of mass transferring
wafers from cassette to cassette. Wafers are gently lifted midpoint in the cassette
slots before extracting or loading to minimize contact with the cassette which could
cause particulation. Safety sensor detects wafers in the pod. Optional mapper
available to detect cross slotted wafers. User-friendly fail-safe operation features
simple one-button actuation. Small footprint saves valuable cleanroom space
Sturdy construction assures high reliability and robustness required in high
throughput fabs. Unit is compatible with SEMI standard FOUPs and FOSBs
Class 1 cleanroom compatible. ESD safe construction.
LCTAS12 - 300mm system
CUSTOM - 200mm bridge FOUP insert versions available
CUSTOM -300mm thin wafer versions available
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AVT - AUTOMATIC VERTICAL WAFER TRANSFER SYSTEM
Vertical transfer machine safely mass transfers wafers between various combinations
of plastic, metal and quartz cassettes. Small footprint saves valuable cleanroom space
Proprietary wafer lifter minimizes alignment problems. Cassettes move, rather than
wafers, for safer, cleaner transfer. Absence of comb pivot points above wafers
ensures cleanliness. Single button operation makes unit very user-friendly. Simple
design for reliability and low maintenance. Class 1 cleanroom compatible
AVT4 - 100mm system
AVT5 - 125mm system
AVT6 - 150mm system
AVT8 - 200mm system
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AWT -AUTOMATIC HORIZONTAL WAFER TRANSFER SYSTEM
Automatic wafer transfer machines safely mass transfers wafers between cassettes
Small footprint design minimizes valuable work bench space required for operation
Color-coded positioning dots make correct cassette placement easy for operators
Heavy-duty construction and high-quality internal components assure long life and
continued accuracy. Cassette position sensors allow operation only when cassettes
are properly positioned to assure safe wafer transfers. Added safety provided by
circuitry which stops transfer when excessive force is detected. ESD safe
construction. Class 1 cleanroom compatible
AWT2HL4 - 100mm system
AWT2HL5 - 125mm system
AWT2HL6 - 150mm system
AWT4HL8 - 200mm system
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WT - MANUAL HORIZONTAL WAFER TRANSFER SYSTEM
Manual wafer transfer machines safely mass transfers wafers between various
combinations of SEMI standard cassettes. Units are constructed of chemical resistant
materials and are ideal for wet areas. ESD safe construction - Class 10 cleanroom
compatible
WT3456AS 75mm, 100mm, 125mm, 150mm compatible system
WT3HAS 75mm HIGH WALL CASSETTE system
WT4HAS 100mm HIGH WALL CASSETTE system
WT5HAS 125mm HIGH WALL CASSETTE system
WT5HLAS 125mm HIGH WALL / LOW WALL CASSETTE system
WT6HAS 150mm HIGH WALL CASSETTE system
WT6HLAS 150mm HIGH WALL / LOW WALL CASSETTE system
WT28HAS 200mm HIGH WALL CASSETTE system
WT28HLAS 200mm HIGH WALL / LOW WALL CASSETTE system
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WT SERIES CUSTOM WAFER FLIPPING HORIZONTAL TRANSFER
A custom version of H-Square's standard WT horizontal slide transfer with special
stage modifications to allow for the cassettes to be inverted (h-bar UP) when
applications dictate a change in orientation of the wafers.
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WT SERIES CUSTOM ODD EVEN HORIZONTAL TRANSFER
A custom version of H-Square's standard WT horizontal slide transfer with special 13
rod transfer arm that allows the operator to switch a safety interlocked cam
mechanism aligning the transfer arm to the ODD or EVEN wafers in a 25 wafer
cassette.
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WS300M 300mm SIMPLE WAFER SORTER
Economical - targeted for cost sensitive applications: R&D, test-assembly-packaging,
& application labs. Simple compact portable design for sorting 300mm wafers
between two SEMI standard FOUP, FOSB or H-Square MC12-25HC metal bake-out
cassettes. Operator opens FOUP manually with attached FOMH door opener, rotates
into position, then uses operator-friendly FPD touch screen software to select
preprogrammed recipe (or manual mode) to move single or multiple wafers between
carriers. Safe - 300mm edge contact grip end-effector includes wafer mapping
sensor which detects wafers and checks for double stack & cross slotting.
Facilities—120V/220V AC Power
WS300M - 300mm simple wafer sorter
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