AUTOMATIC ESD SAFE EZ GUIDE FLAT ALIGNER
This fully automatic microprocessor controlled flat finder provides for wafer flat finding
with minimal operator involvement. To align wafer flats the operator places the carrier on
the unit and pushed the “RUN” switch. All wafer flats are automatically aligned to the
bottom, and then relocated to one of the 16 positions as set by the operator. Accuracy is
better than plus or minus one degree. No manual operation or override is available. All
rotation is controlled at a constant speed for minimal particulate generation. Final wafer
flat a 16 position rotary switch mounted controls location near the RUN switch. Standard
adjustment points are 0, 3, 6, 45, 90, 135, 174, 177, 180, 225, 270, 315, 354 and 357
degrees.
75mm FLAT AFEZ-3 100mm FLAT AFEZ-4 125mm FLAT AFEZ-5
150mm FLAT AFEZ-6 200mm FLAT AFEZ-8
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AUTOMATIC ESD SAFE EZ GUIDE NOTCH ALIGNER
This fully automatic microprocessor controlled notch finder model provides for wafer
notch finding with minimal operator involvement. To align wafer notches, the operator
places the carrier on the unit and pushes one of the “RUN” switches. All wafer notches
are automatically aligned to the bottom, then, relocated to one of the 16 positions as set
by the operator. LED indicates cycle in process and end of cycle. Accuracy is better than
plus or minus one degree. No manual operation or override is available. Rotation is
controlled at a constant speed for minimal particulate generation. A 16 position rotary
switch controls final wafer notch location. Standard adjustment points are 0, 2, 45, 88,
90, 135, 176, 178, 180, 182, 184, 225, 270, 272, 315 and 358 degrees.
150mm NOTCH 25 SLOT: SQ22143-3 150mm NOTCH 12 SLOT: SQ21733-4
200mm NOTCH 25 SLOT: ANFEZQ8
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MANUAL ESD SAFE EZ GUIDE FLAT ALIGNER
Unique wafer roller and alignment system gently captures and positions flats for clean
and accurate operation.
Open design allows increased laminar airflow and improves cleanliness while minimizing
footprint.
EZ Guide positioners assure properly positioned cassettes.
ESD protected by static-dissipative plastics.
Proprietary static-dissipative polyurethane roller withstands more than 2,000,000 cycles
with accuracy of better than 1 degree.
Compatible with most standard plastic wet/dry process cassettes, shipping and storage
cassettes.
150mm FLAT: MFEZ-6 200mm FLAT: MFEZ-8
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MANUAL ESD SAFE EZ GUIDE NOTCH ALIGNER
and accurate operation.
Open design allows increased laminar airflow and improves cleanliness while minimizing
footprint.
EZ Guide positioners assure properly positioned cassettes.
ESD protected by static-dissipative plastics.
Proprietary static-dissipative polyurethane roller withstands more than 2,000,000 cycles
with accuracy of better than 1 degree.
Compatible with most standard plastic wet/dry process cassettes, shipping and storage
cassettes.
150mm NOTCH (25 slot): SQ22143-2 150mm NOTCH (12 slot): SQ21733-9
200mm NOTCH (25 slot): NFEZQ8
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EDGE INSPECTION MANUAL DUAL KNOB ALIGNER
Custom product versions of the standard FFTBAS456/ MFEZ /NFEZQ style manual
aligners. Unique dual knob wafer roller and alignment system is designed for wafer edge
inspection applications.
FFTBAS456 100mm/125mm/150mm: FFTBAS456-001
150mm NOTCH Aligner (25 slot): NFEZQ6-002
150mm FLAT Aligner: MFEZQ6-001
200mm NOTCH and FLAT (25 slot): NFEZQ8-005
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ANTI-STATIC PLASTIC TOP/BOTTOM MANUAL FLAT FINDER
The “FFTBAS-456” model is for use in applications where metallic contamination or
chemical attacks are concerns. It is constructed from black static-dissipative
Polypropylene, which has been custom manufactured to H-Square specifications. This
material has excellent chemical resistance and toughness. Since it is conductive, it will
not build up static charge, which can lead to circuit damage or act as a particulate
magnet. Its proprietary conductive Polyurethane roller (part # A000-379-2) provides a
path from wafers to ground (ground wire included) for ESD protection.This single model
is compatible with most standard 4, 5, and 6-inch plastic wet/dry process carriers,
storage and shipping containers. Unit is NOT compatible with metal cassettes. Custom
models are available for metal cassettes and non-standard carriers
100mm/125mm/150mm: FFTBAS456
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TOP/BOTTOM MANUAL, MOTORIZED, and SEMI-AUTOMATIC FLAT FINDER
The “FFTB” model is the basis for H-Square top/bottom manual, top/bottom motorized
and top/bottom semi-automatic flat finders. They provide an efficient method of aligning
primary or secondary wafer flats without removal of wafers from the carrier. They are
constructed of precision-machined, hard clear anodized, 6061 T-6 aluminum alloy for
durability and long-term dimensional stability. Aluminum also adds mass to the system,
which improves stability during use. Motorized versions utilize industrial quality “D” cells
(one per motorized flat finder) and 9-volt transistor batteries (one per semi-automatic flat
finder).
50mm Flat FFTB1-2 (manual) 75mm Flat FFTB1-3 (manual)
100mm Flat FFTB1-4 (manual) 125mm Flat FFTB1-5 (manual)
150mm Flat FFTB1-6 (manual) 200mm Flat FFTB1-8 (manual)
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MOTORIZED NOTCH FINDER
This battery powered notch finder is designed to align SEMI standard notched wafers.
Similar in principal to flat finders, it uses a small diameter, nylon alignment roller to rotate
the wafers. When the notch registers over the roller the wafers cease rotation, leaving
the notches aligned at the bottom. The roller is attached to a manual lifting mechanism.
After the notches have been aligned to the bottom using the motor drive, the operator
presses a lift bar, which raises the drive roller. The roller lifts all wafers away from the
notch alignment roller. The operator then manually rotates the spinner knob to relocate
aligned notches to desired position. This notch finder is compatible with most standard
plastic wet/dry process carriers and shipping/storage containers.
150mm Notch- SQ22386-2
200mm Notch- NFBT18
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AUTOMATIC 13 SLOT 300mm ESD SAFE EZ GUIDE NOTCH ALIGNER
This fully automatic microprocessor controlled notch finder model provides for wafer
notch finding with minimal operator involvement. To align wafer notches, the operator
places the open bottom 300mm carrier on the unit and pushes the “RUN” switch. All
wafer notches are automatically aligned to the bottom, then, relocated to one of the 16
positions as set by the operator. LED indicates cycle in process and end of cycle.
Accuracy is better than plus or minus one degree. No manual operation or override is
available. Rotation is controlled at a constant speed for minimal particulate generation. A
16 position rotary switch controls final wafer notch location. Standard adjustment points
are 0, 2, 45, 88, 90, 135, 176, 178, 180, 182, 184, 225, 270, 272, 315 and 358 degrees.
300mm AUTO NOTCH, 13 SLOT: ANF3SR1
300mm MANUAL NOTCH, 13 SLOT: NFEZQ12-001 and NFEZQ12-002
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