Handling Tools for the Electronics Industry
PHOTO-LITHOGRAPHY MASK  HANDLING PRODUCTS

MISC2500-007 TABLETOP MACRO BRIGHT LIGHT INSPECTION BOX
Table top bright light reflection containment chamber with a 300 watt (1 million
candlepower) halogen full spectrum light source.  The system includes an
integrated automatic on/off motion sensor switch and an oversized aluminum heat
sink which keep the lamp cool without the need of a fan.Substrates are manually
placed into the black anodized light absorbing chamber and viewed under the
concentrated light source. The enclosed table-top design provides the operator
with a controlled macro light inspection while capturing and diffusing most
deflected light. The small, lightweight but sturdy design allows for placement in an
already crowded production area. 110v electrical power is required. This is a fast
and inexpensive way to examine a surface for particles, haze, scratches and
surface defects.  

MISC2500-007 Brightlight Box

SMIFMAN MANUAL RETICLE SMIF POD OPENER
Provides clean, easy access to photomasks in any RSP reticle storage pod
cassette. The SMIFMAN6 allows the operator to manually open the pod to gain
access to the inner mask cassette or tray. Features a clean storage area for the
pod lid to be stored during operator interface and mask pick holder. All materials
are ESD safe.

SMIFMAN6    RSP150 Opener
SMIFMAN8   RSP200 Opener

SMIFPO8 AUTOMATIC RSP200 RETICLE SMIF POD OPENER
Semi-automatic RSP200 reticle SMIF pod opener provides easy access to
photomasks stored inside RSP200 cassettes with minimal operator involvement.
Units are compatible with most standard RSP200 pod designs. Smooth, reliable lift
automation for reliability and cleanliness. Class One Cleanroom compatible. ESD
protection insured by static dissipative plastics.

SMIFPO8

MPS1 SERIES PHOTOMASK PICKS - SIDE GRIP
Mask picks reduce contamination by eliminating direct contact of mask with hands.
Grippers are designed for edge grip contact with minimal contact to front or back
sides of masks. Picks are lightweight, economical and easy to use. ESD safe
versions available. Custom designs with special angles, customized grippers,
locking triggers, custom materials or other non-standard features are also available

MPS1-50            Standard MPS1 for handling 5" x 5" x 0.090" masks
MPS1-63            Standard MPS1 for handling 6" x 6" x 0.250" masks
MPS1-50-014    ESD safe MPS1 for handling 5" x 5" x 0.090" masks
SQ21457-25      ESD safe MPS1 for handling 6" x 6" x 0.250" masks

Please contact H-Square for additional part numbers

MPH1 SERIES PHOTOMASK PICKS - HORIZONTAL GRIP
Mask picks reduce contamination by eliminating direct contact of mask with hands.
Grippers are designed for edge grip contact with minimal contact to front or back
sides of masks. Picks are lightweight, economical and easy to use ESD safe
versions available. Custom designs with special angles, customized grippers,
locking triggers, custom materials or other non-standard features are also available

MPH151DW           Standard MPH1 for handling 5" x 5" x 0.090" masks
MPH163VO            Standard MPH1 for handling 6" x 6" x 0.250" masks
MPH151DW-005   ESD safe MPH1 for handling 5" x 5" x 0.090" masks
SQ21457-6             ESD safe MPH1 for handling 6" x 6" x 0.250" masks

Please contact H-Square for additional MPH part numbers

MPH1 90° SERIES PHOTOMASK PICKS - HORIZONTAL 90° GRIP
Mask picks reduce contamination by eliminating direct contact of mask with hands.
Grippers are designed for edge grip contact with minimal contact to front or back
sides of masks. Picks are lightweight, economical and easy to use ESD safe
versions available. Custom designs with special angles, customized grippers,
locking triggers, custom materials or other non-standard features are also available

MPH90151DW           Standard MPH1 for handling 5" x 5" x 0.090" masks
MPH90163VO            Standard MPH1 for handling 6" x 6" x 0.250" masks
MPH90151DW-005   ESD safe MPH1 for handling 5" x 5" x 0.090" masks
SQ21457                     ESD safe MPH1 for handling 6" x 6" x 0.250" masks

Please contact H-Square for additional MPH90° part numbers

MPV SERIES MASK HANDLING PICKS - VERTICAL GRIP
Mask picks reduce contamination by eliminating direct contact of mask with hands.
The MPV series mask pick provides a means to lift a mask from a vertical position
like a photomask cassette. Picks are lightweight, economical and easy to use
ESD safe versions available. Custom designs with special angles, customized
grippers, locking triggers, custom materials or other non-standard features are
also available

MPV1-4          Standard MPV for handling 4" x 4" masks
MPV1-5          Standard MPV for handling 5" x 5" masks
MPV1-6          Standard MPV for handling 6" x 6" masks
SQ21457-4   ESD safe MPV for handling 6" x 6" masks

Please contact H-Square for additional MPV part numbers

MPH - MPC SERIES CUSTOM HORIZONTAL OFFSET MASK HANDLING PICKS
Mask picks reduce contamination by eliminating direct contact of mask with hands.
The MPH/MPC series mask picks provide a means for loading masks into a
cleaner tool or recessed cavity. Grippers are offset anywhere from 1.7" to 11" from
the handle. Picks are lightweight, economical and easy to use ESD safe versions
available. Custom designs with special angles, customized grippers, locking
triggers, custom materials or other non-standard features are also available

MPH163-004 for 6" x 6" x 0.250" mask handling pictured

SQ21518 SERIES MASK HANDLING PICKS - NIKON STEPPER CARTRIDGES
Mask picks reduce contamination by eliminating direct contact of mask with hands.
The four gripper horizontal offset SQ21518 mask pick is designed to load and
unload masks from a NIKON Stepper mask cartridge. Picks are lightweight,
economical and easy to use. Many designs feature a locking latch trigger to safe
guard the premature release of a valuable photomask. All designs are ESD safe.

SQ21518-16 for 6" x 6" x 0.250" mask handling pictured

MISC2500 and SQ20999 SERIES MASK CASSETTE LIFTER BLOCKS
Lifter blocks are designed to provide easy access to masks. Masks are lifted out of
cassettes, providing access to mask edges for removal with appropriate style mask
pick. Mask lifter blocks are available in a variety of sizes and materials, many of
which are ESD safe

SQ20999-2 for 6" x 6" x 0.250" in an ASML RSP cassette pictured

PC SERIES PTFE TEFLON® PHOTOMASK CLEANING CASSETTES
All PTFE cassettes hold photo masks in a vertical position for easy cleaning in  
various processing baths. Photomask cleaning cassettes are available in a variety
of sizes and either incorporate a handle or wet bench automation flanges. Lifter
blocks can be incorporated to lift the mask up to interface.

SQ21408 SERIES PHOTO-MASK INSPECTION & CLEANING STATION
Mask inspection stand facilitates hands off visual inspection and Nitrogen or CDA
blow off applications. Two 360° degree theta motions allow for easy positioning of
masks under bright light. Smooth operation makes it easy to scan for and pinpoint
particles. Compact tabletop design saves expensive cleanroom space. Cost
efficient alternative to automatic/semiautomatic inspection tools. Made from ESD
safe cleanroom materials to insure cleanliness.

SQ21408-1 for 6" x 6" x 0.250" masks pictured

GP SERIES PHOTOMASK RESCUE VACUUM WAND ASSEMBLY
Six vacuum cup mask rescue tool for removing automation stranded masks from
production tools. 90° degree angle and horizontal offset versions available
Made from ESD safe cleanroom materials to insure cleanliness.

GP95-004 for 6" x 6" x 0.250" mask rescue pictured
H-Square’s complete line of photomask picks is the result of years of work with semiconductor companies and
mask shops to provide a non-contaminating secure means of handling reticles.  Mask Picks can reduce
contamination by eliminating direct contact of the mask by an operator’s hands. Masks are easily inserted and
extracted from various fixtures and storage containers, and are securely gripped while loaded in the pick. With
the stringent cleanliness requirements for sub-micron applications today, mask picks have become
indispensable.
In addition to standard mask picks, H-Square has designed many customized picks for special applications.
Special handle angles, locking triggers, high temperature grippers, heavy lifting capacity or completely unique
designs are available.
MPV and MPS Style ESD
safe photo mask picks
SMIFMAN6 ESD safe
manual RSP opener
Copyright © 2011 - H-Square Corporation  Santa Clara, California, USA All Rights Reserved