H-Square’s complete line of photomask handling tools is the result of years of work with semiconductor companies and mask shops
to provide a non-contaminating secure means of handling reticles.  Mask Picks can reduce contamination by eliminating direct
contact of the mask by an operator’s hands. Masks are easily inserted and extracted from various fixtures and storage containers,
and are securely gripped while loaded in the pick. With the stringent cleanliness requirements for sub-micron applications today,
mask picks have become indispensable. In addition to mask picks, H-Square has designs for many support tools for opening and
closing reticle pods to PM mask inspection and cleaning.
Photomask Handling
Automation & Wafer Handling Tools for the Electronics Industry
MPS Style Photomask Picks - Side Grip
MPS1 series antistatic photomask picks handle the mask reticle from the SIDE tangential edges of
the mask to reduce contamination by eliminating direct contact of mask with gloved hands.
MPS1
clamp pick tools are designed with a 15° angle handle allows the removal from and placement into a
storage
container of a single mask, mask with pellicle or other types of substrates. The tool is
capable of
picking up substrates weighing up to two pounds.
Part Number
Description
Material
MPS1-50-014
5"x5"x0.090"
Antistatic Polypropylene
SQ21457-25
6"x6"x 0.250"
Antistatic Polypropylene
MPS1-71-001
7"x7"x0.120" or 7" x 7" x 0.150"
Antistatic Polypropylene
MPS1-001
9"x9"x0.120"
Antistatic Polypropylene
 
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MPH Style Photomask Picks - Offset Grip
Special application version of MPH with a horizontal offset height.  Common for handling 6"x6"x
0.250" masks from a cleaner cavity.  
MPH1 series mask picks handle the mask reticle from the top
and bottom orientation tangential edge to reduce contamination by eliminating direct contact of mask
with gloved hands. MPH
offset versions are commonly used to load masks into metrology and mask
cleaning support systems where side clearances on the MPS1 do not fit.
Minimum quantity ordering
applies to this design.
Part Number
Description
Material
MPH163-004
6"x6"x0.250"; 3.0" offset
Antistatic Polypropylene
MPH163-005
6"x6"x0.250"; 4.0" offset
Antistatic Polypropylene
MPH163-006
6"x6"x0.250"; 5.0" offset
Antistatic Polypropylene
     
 
MPH Style Photomask Picks - Horizontal Grip
MPH1 series antistatic photomask picks hand the mask across the mask top from the mask tangential
edge (not touching the face of the mask).
The horizontal (MPH1) is compatible with most single and
multiple plate containers, and many vacuum chucks, microscope stages and other fixtures.
Standard
MPH1 mask picks feature a 15
degree angled handle.
Part Number
Description
Material
MPH151DW-005
5"x5"x0.090"
Antistatic Polypropylene
SQ21457-6
6"x6"x0.250"
Antistatic Polypropylene
MPH172DW-003
7"x7"x0.120"  or 7"x7"x0.150"
Antistatic Polypropylene
     
 
Nikon Cartridge Photomask Picks - 4 Point Grip
Mask picks reduce contamination by eliminating direct contact of mask with hands. The four gripper
horizontal offset SQ21518 mask pick is designed to load and unload masks from a NIKON Stepper
mask cartridge. Picks are lightweight, economical and easy to use. Many designs feature a locking
latch trigger to safe guard the premature release of a valuable photomask. All designs are ESD safe
(antistatic).
Part Number
Description
Material
SQ21518-40
5"x5"x0.090"
Antistatic Polypropylene
SQ21518-1
6"x6"x0.250", no Pelicle
Antistatic Polypropylene
SQ21518-32
6"x6"x0.250"; 122mm Pellicle
Antistatic Polypropylene
SQ21518-46
6"x6"x0.250"; 93mm Pellicle
Antistatic Polypropylene
 
EUV Photomask Picks
MPS3 series mask picks handle the EUV mask reticle from the SIDE upper tangential edge of the
mask to reduce contamination by eliminating direct contact of mask with gloved hands. MPS
3
versions are directly compatible with most mask
EUV handling pods.  Custom versions are available.
Part Number
Description
Material
MPS3-63AS-002
6"x6"x 0.250"
Antistatic Polypropylene
     
     
     
 
MPV Style Photomask Picks - Vertical Grip
Mask Pick, Vertical (MPV1) allows easy loading and unloading of square masks from multiple plate
cassettes and storage boxes for transfer or visual inspection purposes. MPV1 models are used
almost exclusively for loading the unloading plates from multiple plate carriers. The MPV1 contacts
the mask in four positions and only touch the tangential edge of the mask without damaging the
chrome.  .
Part Number
Description
Material
MPV1-5-002
5"x5"x0.090"
Antistatic Polypropylene
SQ21457-4
6"x6"x0.250"
Antistatic Polypropylene
SQ21457-9
7"x7"x0.120" or 7"x7"x0.150"
Antistatic Polypropylene
MPV1-005
9"x9"x0.120"
Natural Polypropylene
 
Manual RSP150 Reticle SMIF Pod Opener
Provides clean, easy access to photomasks in any MSP or RSP reticle storage pod cassette. The
SMIFMAN6 allows the operator to manually open the pod to gain access to the inner mask cassette or
tray. Features a clean storage area for the pod lid to be stored during operator interface and mask
pick holder. All materials are ESD safe.
Part Number
Description
Material
SMIFMAN6
Manual RSP150 Opener
Antistsatic Polypropylene
     
     
     
 
Automatic RSP150 Reticle SMIF Pod Opener
Semi-automatic RSP150 reticle SMIF pod opener provides easy access to photomasks stored inside
RSP150 cassettes with minimal operator involvement.
Units are compatible with most standard
RSP150 pod designs. Smooth, reliable lift automation for reliability and cleanliness. Class One
Cleanroom compatible. ESD protection insured by static dissipative plastics.
Part Number
Description
Material
SMIFPO16
Auromatic RSP150 Opener
Various, Antistatic
     
     
     
Automatic RSP200 Reticle SMIF Pod Opener
Semi-automatic RSP200 reticle SMIF pod opener provides easy access to photomasks stored inside
RSP200 cassettes with minimal operator involvement.Units are compatible with most standard
RSP200 pod designs. Smooth, reliable lift automation for reliability and cleanliness. Class One
Cleanroom compatible. ESD protection insured by static dissipative plastics.
Part Number
Description
Material
SMIFPO8-E-002
Automatic RSP200 Opener
Various Antistatic
     
     
     
Manual RSP200 Reticle SMIF Pod Opener
Provides clean, easy access to photomasks in any MSP or RSP reticle storage pod cassette. The
SMIFMAN8 allows the operator to manually open the pod to gain access to the inner mask cassette
or tray. Features a clean storage area for the pod lid to be stored during operator interface and
mask pick holder. All materials are ESD safe.
Part Number
Description
Material
SMIFMAN8
Manual RSP200 Opener
Antistatic Polyproplene
     
     
     
Bright Light Inspection Box
Table top bright light reflection containment chamber with a 250 watt halogen full spectrum light
source.  The system includes an integrated automatic on/off motion sensor switch and an over-sized
heatsink to cool the lamp without the need of a fan. Substrates are manually placed into the black
anodized light absorbing chamber and viewed under the concentrated light source.
Part Number
Description
Material
MISC2500-007
12"x12"x12" 120VAC
Anodized Sheetmetal
MISC2500-015
24"x24"x24" 120VAC
Anodized Sheetmetal
MISC2500-018
12"x12"x12" 220VAC
Anodized Sheetmetal
MISC2500-016
24"x24"x24" 220VAC
Anodized Sheetmetal
Mask Cleaning Cassettes
All PTFE cassettes hold photo masks in a vertical position for easy cleaning in  various processing
baths. Photomask cleaning cassettes are available in a variety of sizes and either incorporate a
handle or wet bench can be incorporated to lift the mask up to interface.
Part Number
Description
Material
PC-076
2 slots 5"x5", 2 slots 6"x6" masks
PTFE and PFA Teflon®
PC-025
2 slots 5"x5", 2 slots 7"x7" masks
PTFE and PFA Teflon®
PC-012
4 slots 7"x7" masks
PTFE and PFA Teflon®
PC-005
4 slots 9"x9" masks
PTFE and PFA Teflon®
 
Mask Pick Holders
H-Square mask pick holders are designed to keep the mask pick clean and damage free. Storage in
a mask pick holder is highly recommended when the mask pick tool is not being used. The laminar
flow curved holding ring design minimizes particle generation with the mask pick handle. HMP holders
are available in 1, 3 or 4-position models. Material is cleanroom compatible all-welded
electro-polished stainless steel.
Part Number
Description
Material
HMP1
1-place mask pick holder
EP Stainless Steel
HMP3
3-place mask pick holder
EP Stainless Steel
HMP4
4-place mask pick holder
EP Stainless Steel
     
 
MPH Style Photomask Picks - 90 Degree
A special application 90 degree handle version of MPH1 series mask pick.  This unique handle allows
the operator to place the m
ask or reticle into a cavity while reducing contamination by eliminating
direct contact of mask with gloved hands.
Part Number
Description
Material
MPH163VO90-001
6"x6"x0.250"
Antistatic Polypropylene