Handling Tools for the Electronics Industry
COMPOUND SEMICONDUCTOR HANDLING PRODUCTS
H-Square's extensive experience in handling Compound Semiconductor materials has brought innovation and low
cost solutions to benefit both R&D and production-scale compound semiconductor manufacturing groups.
Automated systems and a wide variety of manual handling tools have been developed for emerging technologies
in wireless networks and optoelectronic manufacturing. Driven by the demand for wireless technology, gallium
arsenide (GaAs) has been the most used compound semiconductor material by volume. In addition, sapphire and
silicon carbide (SiC) have been benefiting from the booming LED market, while gallium nitride (GaN) has become
the preferred choice for blue laser diode makers. Indium Phosphide (InP) is increasingly used for fiber-optic
communication applications. The unique properties, applications and high cost of compound semiconductor
materials dictate special handling considerations and tooling.  H-Square has extensive knowledge for handling
these unique substrates and can offer compound semiconductor customers a wide range of handling solutions.
Copyright © 2011 - H-Square Corporation  Santa Clara, California, USA All Rights Reserved
SQ21733-8
EZ Guide 12 slot ePak cassette version - antistatic automatic
wafer notch aligner for 150mm notched substrates. Class 1

SQ22143-3 (not pictured)
EZ Guide 25 slot cassette version - antistatic automatic wafer
aligner for 150mm notched substrates. Class 1

Manual EZ Guide aligners also available
WT3H-002
Cassette to cassette slide transfer for unloading 75mm Sic
and Sapphire substrates from an ePak shipping cassette

WT3H-001 (not pictured)
Cassette to cassette slide transfer for loading a 75mm ePak
shipping cassette (no h-bar design)
T693PKAS3 + NOASPF2 + HSU + CC11SDS
Recommended ESD safe house vacuum setup for general
handling 150mm heavy substrates like SiC and sapphire.

T696PK - Optional UHMW and PEEK vacuum tip available for
wafer makers.
T691PKAS + NOASPF2 + HSU + CC11SDS
Recommended ESD safe house vacuum setup for general
handling of 50mm, 75mm and 100mm LED substrates

T691PK-001 (not pictured)
Optional UHMW and PEEK vacuum tip available for wafer
makers.
MCP - mechanical
edge grip pick
ETAS1 - manual
wafer escalator
MFEZ - manual
EZ-Guide™
flat aligners